Brooks VX TopCooler - Normal Cooling Cycle Operation; Initial State; Load Wafer Sequence

3. Operation VX TopCooler
Normal Cooling Cycle Operation Part Number: 606325 Rev. A
Figure 3-2: TopCooler Valve Operation
Normal Cooling Cycle Operation
Initial State
TheChargingValve,BackfillValve,andPoppetareclosed.
TheRoughOutValveisopen.
Load Wafer Sequence
TheRoughOutValveisclosed.
ThePoppetisopened.
Awaferisplacedonthepoppetwafershelf.
ThePoppetisclosed,loweringthewaferontothechillplate.
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