Brooks VX TopCooler - Parts; Topcooler Cool Chuck Cleaning

4. Maintenance and Repair VX TopCooler
TopCooler Cool Chuck Cleaning Part Number: 606325 Rev. A
Parts
BrooksAutomationcanprovideallpartsrequiredforPreventiveMaintenance.Foralistofthese
parts,contactBrooksAutomationCustomerSupport.Toobtainadditionalinformationaboutparts
forpreventivemaintenance,contactthelocalBrookssalesrepresentative,orcallBrooks
AutomationCustomerSupport.SeeContactUsformoreinformation.
TopCooler Cool Chuck Cleaning
TheCoolChuckmaybecleanedwithoutremovingitfromtheTransportChamber.
RequiredTools
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MetricHexWrenches
MaintenanceStrategy
TheCoolChuckisreadilyaccessibleafterremovingthedrop-inPoppetAssembly.Turnoffand
disconnectallpower,communications,andairconnectionsasdetailedintheShut-downsectionof
thesystemmanual.
Lockout / Tagout
Workingwithenergizedequipmentmaycausesuddenmovementorelectricalshockand
mayresultindeathorseriousinjury.
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Allenergymustberemovedfromtheequipmentperthefacility’s
Lockout/Tagoutprocedurebeforeservicing.
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Iflocalproceduresarenotavailable,followtheprocedureforLockout/Tagoutin
OSHA Standard 29CFR 1910.147.
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