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VX TopCooler
Page 47 (Field Replaceable Units)
Brooks VX TopCooler - Field Replaceable Units
47 pages
Manual
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Brooks
Automation
6.
Field
Replaceable
Units
Part
Number:
606325
Rev.
A
6. Field Replaceable
Units
See
the
FRU
list
supplied
with
the
System
and
associated
FRU
procedures.
Copyright
©
2023,
Brooks
Automation,
Inc.
47
46
Table of Contents
Main Page
Revision History
5
Table of Contents
6
Introduction
7
Process Overview
8
Block Diagram
8
Cool Chamber Cover
9
Cool Tray
9
Topcooler Vacuum and Vent
9
Topcooler Pneumatics
9
Repair
9
Safety
10
Explanation of Hazards and Alerts
11
Safety Text
11
Safety Icons
11
Signal Words and Color
11
Alert Example
12
General Safety Considerations
13
Mechanical Hazards
15
Environmental Information
16
Recycling and Hazardous Materials
16
Operation
18
Normal Cooling Cycle Operation
20
Initial State
20
Load Wafer Sequence
20
Metering of Gas Charge
21
Cooling Cycle
21
Rough out
21
Wafer Unload
21
Setting the Cooling Cycle Time
21
Selecting the Cooling Gas
22
Maintenance and Repair
23
Preventative Maintenance
23
Parts
24
Topcooler Cool Chuck Cleaning
24
O-Ring Removal/Replacement/Cleaning
27
Topcooler Replacement
30
Topcooler Poppet Bellows Replacement
33
Topcooler Chuck O-Ring Replacement
36
Topcooler Poppet Speed Adjustment
39
Topcooler Poppet Open/Close Sensor Adjustment
42
Troubleshooting
44
Initial Troubleshooting
44
Field Replaceable Units
47
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