Brooks VX TopCooler - Cool Chamber Cover; Cool Tray; Topcooler Vacuum and Vent; Topcooler Pneumatics

Brooks Automation 1. Introduction
Part Number: 606325 Rev. A Cool Chamber Cover
Cool Chamber Cover
Thecoolchambercover,orpoppet,isattachedtoapneumaticdrivemechanismthatopensand
closesthepoppet.Thismechanismiscapableofholdingthepoppetclosedwhilethecoolchamber
ispressurizedupto100Torr.Allcontrolandmonitoringofthepoppetmechanismisdonethrough
theI/Ocommunicationslinktothecontroller.
Cool Tray
Thecoolchamberbase,orcooltray,isafixedaluminumplatewithchannelsonitssurface,and
standoffstopreventthewaferfromcontactingitdirectly.Thechannelsallowtheprocessgastobe
effectivelydistributedbetweenthewaferandthecooltray,facilitatingthermaltransfer.
TopCooler Vacuum and Vent
TheTopCoolervacuumandventsystemconnectstotheplantfacilitiesandprovidescontrolofall
gasesinjectedintothecoolchamberandremovalofthosegases.BrooksAutomationpatented
uniquegasmeteringmechanicseliminatesuncontrolledpressurespikesduringequalization.Gas
backfillunderthepoppetismeteredusingafixedvolumeofpressurizedgaswhichisthenallowed
toexpandintothepreviouslyevacuatedpoppetchamber.
Thevolumeofgasisdefinedbythevolumebetweenthechargingvalveandthebackfillvalve.The
meteredvolumeofgasisfactorydeterminedbythemechanicaldesignofthepipingsystem.The
gasisregulatedtoacontrolledpressure,thenallowedtoexpandintothecombinedvolumeofthe
poppetplusthedefiningpiping.
TopCooler Pneumatics
Thepneumaticsystemconnectstotheplantfacilitiesandprovidespowertodrivethevalve
actuatorsandthepoppetdrivecylinder.
Thereisa2-waycheckvalveinstalledbeforethepoppetdrivecylindertoholdthepositionofthe
topcoolerpoppetforupto7days.
Repair
Topdrop-instylepoppetmechanismcanbereplacedforwafersizechange,coolingchuckcleaning
andpoppetsealreplacementbyremovingfourscrewsanddisconnectingacableandtwoairhoses.
TotalMTTRislessthan30minutes.See"MaintenanceandRepair"onpage23forservice
procedures.
Copyright © 2023, Brooks Automation, Inc.
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