Brooks VX TopCooler - Metering of Gas Charge; Cooling Cycle; Rough out; Wafer Unload

Brooks Automation 3. Operation
Part Number: 606325 Rev. A Setting the Cooling Cycle Time
Metering of Gas Charge
TheChargingValveisopened.
AgasentersthefeedlinebetweentheChargingValveandtheBackfillValvecreatingametered
amountofthegas.
TheChargingValveisclosed.
PressureGaugeswitchactivateshighoutputindicatingchargeispresent.
Cooling Cycle
TheBackfillValveisopened.
Themeteredamountofgasisdischargedintothecoolchamber.
Thechamberremainsclosedforatimedeterminedbytheuser.
PressureGaugeswitchreturnstoneutralstate(nohighorlowoutputs).
Rough out
Theroughinglineisopened.
Gasisremovedfromthechamber.
PressureGaugeswitchactivateslowoutputindicatingchamberpumpeddown.
Wafer Unload
TheRoughOutValveisclosed.
TheBackfillValveisclosed.
ThePoppetisopened.
Thewaferisremoved.
Innormaloperation,onceawaferisunloaded,anewwaferisimmediatelyplacedintothe
TopCoolerandthepoppetvalveisclosed.If,however,anewwaferisnotplacedintothechamber
beforethevalveisclosed,theroughinglineisreopenedtorestoretheTopCoolertotheinitialstate.
TheTransportChambermustbeatvacuumtooperatetheTopCoolerproperly.IftheTransportChamberis
changedtoatmosphereandawaferisintheTopCooleratvacuum,theTransportChambermustbepumped
downbeforeattemptingtoopentheTopCoolerpoppetordamagetothewaferwilloccur.
Setting the Cooling Cycle Time
Thetimethatthechamberremainsclosedafterthecoolingcycleiscompleteisdeterminedbythe
user.
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