Brooks VX TopCooler - Topcooler Poppet Speed Adjustment

Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A TopCooler Poppet Speed Adjustment
TopCooler Poppet Speed Adjustment
ThepoppetisthemoveablelidforthecoolchamberintheTopCooler.Adjustingthespeedensures
timelyhandoffandminimizesanywafermovement.
RequiredTools
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Acomputerrunningaterminalemulatororadumbterminal
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Small,straight-slotscrewdriver
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Stopwatch
AdjustmentStrategy
RemoveallmaterialfromtheTopCoolerPoppetandtheCoolTraybeforeproceeding.Keephands
clearoftheTopCoolerPoppetandCoolTrayatalltimes.
Lockout / Tagout
Workingwithenergizedequipmentmaycausesuddenmovementorelectricalshockand
mayresultindeathorseriousinjury.
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Allenergymustberemovedfromtheequipmentperthefacility’s
Lockout/Tagoutprocedurebeforeservicing.
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Iflocalproceduresarenotavailable,followtheprocedureforLockout/Tagoutin
OSHA Standard 29CFR 1910.147.
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Copyright © 2023, Brooks Automation, Inc.
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