Brooks VX TopCooler - Page 38

4. Maintenance and Repair VX TopCooler
TopCooler Chuck O-Ring Replacement Part Number: 606325 Rev. A
ReplacementProcedure
Step Action
1.
RemovethePoppetAssembly.Refertotheprocedureinthe"VacuumAlignerReplacement"pro-
cedureinthesystemmanual.
2.
Theo-ringisnowaccessibleforcleaningasshowninFigure4-2.Usethe"O-RingRemoval/Re-
placement/Cleaning"onpage27proceduretoreplacetheo-ring.DonotapplyanytypeofVacuum
Grease.
3.
ReplacethePoppetAssemblyandsecurethehardware.

Figure 4-2: Cool Chuck O-Ring Location
Annotation Description
A AccessHole
B O-Ring
C CoolChuck
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