Brooks VX TopCooler - Maintenance and Repair; Preventative Maintenance

Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A Preventative Maintenance
4. Maintenance and Repair
Preventative Maintenance
ThischapterprovidesthescheduleandproceduresforroutinepreventivemaintenanceoftheMicro
MarathonExpress.BrooksAutomationrecommendsthatthepreventivemaintenanceprocedures
andscheduleprovidedinthissectionbefollowedtoextendtheoperatinglifeofthesystemandto
minimizeunscheduleddowntime.Ifadditionalproceduresarerequired,theywillbesupplied,along
withtheirmaintenanceschedules,byBrooksAutomation.
AllPreventiveMaintenanceproceduresandschedulesprovidedherearemadewiththe
assumptionthatthesystemisoperatinginaclean,dry,inertenvironment.Anydeviationfromthis
basicenvironmentwillaffecttheschedulingofPMandmayalsorequireadditionalPMprocedures.
TheusershouldadjustthePreventativeMaintenanceScheduleasappropriatetoaccountforany
deviationsfromthisenvironment.
Unauthorized Service
Personalinjuryordamagetoequipmentmayresultifthisrobotisoperatedorservicedby
unauthorizedpersonnel.
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Onlyqualifiedpersonnelareallowedtotransport,assemble,operate,ormaintainthe
system.
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Properlyqualifiedpersonnelarethosewhohavereceivedcertifiedtrainingandhavethe
properqualificationsfortheirjobs.ReadandunderstandtheSafetychapterbefore
performinganyprocedure.
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Duetothepossibleinterferencebetweena200mmwaferinthealignerandanotherontherobot’sarm,therobot
shouldnotberotatedormovedduringmaintenanceifthereisa200mmwaferintheVacuumAligner.
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