Brooks VX TopCooler

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5. Troubleshooting VX TopCooler

Initial Troubleshooting Part Number: 606325 Rev. A

7.MainChamberTooHot

Ifthemainchamberisrunningataveryhightemperature,thecoolingparametersmayhavetobe

increasedbeyondthespecifiedparameters.ContactBrooksAutomationforassistance.

8.PressureAdjustment

Verifythattheairorgaspressureiswithintherangespecifiedinthe"Specifications"sectionofthe

systemmanual.

Brooks VX TopCooler - Page 46