Brooks VX TopCooler - Page 25

Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A TopCooler Cool Chuck Cleaning
Thesystemmaybeusedinanenvironmentwherehazardousmaterialsarepresent,
andsurfacesmaybecontaminatedbythosematerials.

Whenthisisthecase,refertothefacility’sMaterialSafetyDataSheetsforthose
materialstodetermineproperhandlingandfollowthefacility’sprocedurestocertify
theenvironmentissafe.

Copyright © 2023, Brooks Automation, Inc.
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