Brooks VX TopCooler - Page 26

4. Maintenance and Repair VX TopCooler
TopCooler Cool Chuck Cleaning Part Number: 606325 Rev. A
MaintenanceProcedure
Step Action
1.
RemovethePoppetAssemblybyremovingthe(4)M8screwssecuringtheassemblytotheTransport
Chamber(refertothe"VacuumAlignerReplacement"procedureinthesystemmanual.
2.
TheCoolChuckisnowaccessibleforcleaning.Usethe"PadCleaningProcedure"inthesystem
manualtothoroughlycleantheplate.Donotallowalcoholtopermeatetheo-ring.

Itisrecommendedthattheo-ringberemovedbeforecleaningandreplacedwhenevertheplate
requiresarigorouscleaning.Referto"TopCoolerChuckO-RingReplacement"onpage36.
3.
ReplacethePoppetAssemblyandsecurethehardware.
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