Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A TopCooler Poppet Open/Close Sensor Adjustment
AdjustmentProcedure
Step Action
1.
LocatethePoppetValveSensorsonthesideofthePoppetactuator.
2.
Looseneachsensorbyturningitslockingscrewcounterclockwise.
3.
SlidetheOpensensorupuntilitreachestheendoftravel.TheLEDshouldbegreen.
4.
Usingtestsoftware,openthePoppetvalve.
5.
SlowlyslidetheOpensensordownitstrackuntiltheLEDchangesfromgreentoyellow/red.
6.
LocktheOpensensorinplacebyturningthelockingscrewclockwiseuntilsnug.
7.
SlidetheClosesensordownuntilitreachestheendoftravel.TheLEDshouldbegreen.
8.
Usingtestsoftware,closethePoppetvalve.
9.
SlowlyslidetheClosesensorupitstrackuntiltheLEDchangesfromgreentoyellow/red.
10.
LocktheClosesensorinplacebyturningthelockingscrewclockwiseuntilsnug.
Copyright © 2023, Brooks Automation, Inc.
43