Brooks VX TopCooler - Page 2

VX TopCooler
Part Number: 606325 Rev. A
Brooks Automation, Inc.
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Informationprovidedwithinthisdocumentissubjecttochangewithoutnotice,andalthoughbelievedtobeaccurate,
BrooksAutomation,Inc.assumesnoresponsibilityforanyerrors,omissions,orinaccuracies.
ABF™,AcuLigner™,AdvanTag™,Align™,AutoTeach™,ATR™,AXM™,BasicBlue™,BiSymmetrik™,
CenterSmart™,CratetoOperate™,CrossingConnect™,DARTS™,Enerta™,e-RMA™,e-Spares™,e-
Volution™,Falcon™,FastRegen™,FIXLOAD™,FrogLeg™,IndependentTwinLinearExchange™,InLigner™,
Interface™,Isoport™,ITLX™,Jet™,JetEngine™,LEAP™,LowProfile™,M2Nano™,PASIV™,PowerPak™,
PerformanceBlue™,PlateAuditor™,PowerPak™,PowerTools™,PuroMaxx™,QuadraFly™,Radius™,
Radient™,RadientExpress™,Reliance™,RelianceATR™,RetroEase™,SCARA™,SmartPM™,SPOTLevel™,
Sprint™,Synetics™,TheNewPathwaytoProductivity™,TimeOptimizedTrajectory™,TimeOptimalTrajectory™,
TimeOptimizedPath™,TopCooler™,TopLigner™,UltimateBlue™,VAC-407™,VacuTran™,VersaPort™,and
WaferEngine™aretrademarksofBrooksAutomation,Inc.
AcuTran®,Asyst®,CrossingAutomation®,Fusion®,GOLDLink®,Guardian®,Helix®,Leapfrog®,MagnaTran®,
MapTrak®,Marathon®,Marathon2®,MarathonExpress®,Razor®,Spartan®,TrueBlue®,TurboPlus®,Vision®,
Zaris®,andtheBrookslogoareregisteredU.S.trademarksofBrooksAutomation,Inc.
Allothertrademarksarepropertiesoftheirrespectiveowners.
©2023BrooksAutomation,Inc.Allrightsreserved.Theinformationincludedinthismanualisproprietary
informationofBrooksAutomation,Inc.andisprovidedfortheuseofBrookscustomersonlyandcannotbeusedfor
distribution,reproduction,orsalewithouttheexpresswrittenpermissionofBrooksAutomation,Inc.
ThistechnologyissubjecttoUnitedStatesexportAdministrationRegulationsandauthorizedtothedestination
only;diversioncontrarytoU.S.lawisprohibited.
OriginalmanualprintedinEnglish.TranslationoftheoriginalmanualfromEnglish.
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Copyright © 2023, Brooks Automation, Inc.