Brooks VX TopCooler - Page 35

Brooks Automation 4. Maintenance and Repair
Part Number: 606325 Rev. A TopCooler Poppet Bellows Replacement
ReplacementProcedure
Step Action
1.
RemovethePoppetAssembly.Refertotheprocedureinthe"VacuumAlignerReplacement"pro-
cedureinthesystemmanual.
2.
PlacethePoppetAssemblyonaworkbench.RemovethecoverbylooseningtheRetainingCover
Knob.
3.
Removethe(4)M6x16mmSBHSscrewsandremovetheHardStopPlate.
4.
Disconnecttheair.
5.
DisconnecttheUp/Downsensorassemblies.
6.
RemovetheM8x25mmSHCSlocatedintheElastomer.
7.
Removethe(4)M6x30mmSHCSandM6splitwasherssecuringtheCylinderMountPlatetothe
MountingFlange.LifttheCylinderMountingPlateandtheAirCylinderandPlatewillliftout.
8.
Thebellowsarenowvisible.Removethe(4)M6x12mmSHCSwithM6splitwashersandremovethe
BellowsWeldment.
Twoo-ringsarealsoassociatedwiththereplacementoftheBellows.
Brooksrecommendsthattheseo-ringsbereplacedwhenevertheBellowsarereplaced.
9.
ReplacetheBellowsWeldmentbyfullyseatingitintotheMountingFlangewiththeBellowsringout.
10.
Replaceallpartsandhardware.

Copyright © 2023, Brooks Automation, Inc.
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