P.32
PM10U
EBARA
CORPORATION
Connect the power connector for the main power supply (3Phase, 200-240V±10% and 50/60Hz).
Fig. 3.4, Table 3.2 and 3.3 shows the pin assignment of the power connector.
Connector pin is a screw fix type. Please make sure to tighten the screw enough to fix the
connector pin.
Please wire the connector pin by the specialized tool.
Table 3.3 Receptacle and Plug Specifications
Receptacle type C016 20C003 100 12
Receptacle Manufacture Amphenol
Adapted plug type C016 20D003 100 12
Suitable wire AWG #14
Power capacity [kVA] 3.0
No. Phase
1R
2S
3T
GND GND
Table 3.2 Pin Assignment of
Power Supply Receptacle
Fig. 3.4 Power Supply Receptacle
(As seen from connecting side)
1 2
GND 3
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