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Edwards STP-451C User Manual

Edwards STP-451C
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STP-301/451 Series Instruction Manual
10-4
Table 10.3 Safety Functions
Abnormality
/Error
Operation state
of safety
functions
Lamp
indication
LCD
REMOTE
output signal
State of the STP pump
Probable causes of an
abnormality/error
Reset by
RESET
operation
Power failure Power failure
time: 2 seconds
or longer.
"FAILURE"
illuminates.
"POWER"
distinguishes.
"POWER
FAILURE"
"ALARM"
"POWER ON"
output cut-off
The magnetic bearing
continues to operate using
regenerative energy.
The STP pump decelerates
and stops.
The rotor lands on the
touch down bearing at
approx. 17,000 rpm.
Power failure.
Power cable breakage.
Power cable disconnection.
Impossible
Abnormal
magnetic
bearing
Rotor descends
onto the touch
down bearing.
"FAILURE" "DISTURBANCE" "ALARM" The rotor stops on the
touch down bearing.
STP connection cable
breakage.
STP connection cable
disconnection.
Abnormal control circuit.
Possible
Excessive
vibration
Rotor vibration:
100 μm 0-P or
more.
"FAILURE" "DISTURBANCE" "ALARM" The STP pump decelerates
and stops.
External vibration, and
impact.
Intrusion of atmospheric
air.
Intrusion of foreign
particles.
Possible
Overload of
motor driver
Excessive
current flows in
the motor.
"FAILURE" "OVERLOAD" "ALARM" The STP pump decelerates
and stops.
Leakage from the vacuum
equipment or piping.
Insufficient pressure at
inlet and outlet port sides.
Failure of starting of the
backing pump.
Possible

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Edwards STP-451C Specifications

General IconGeneral
BrandEdwards
ModelSTP-451C
CategoryWater Pump
LanguageEnglish

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