Edwards STP-451C - Page 91

STP-301/451 Series Instruction Manual
10-5
Abnormality
/Error
Operation state
of safety
functions
Lamp
indication
LCD
REMOTE
output signal
State of the STP pump
Probable causes of an
abnormality/error
Reset by
RESET
operation
Overheating
inside the STP
pump
Temperature of
the STP pump
motor: 110℃ or
more.
"FAILURE" "PUMP
OVERTEMP"
"ALARM" The STP pump decelerates
and stops.
Abnormal baking
temperature.
Insufficient cooling.
Leakage of vacuum
equipment or piping.
Continuous repetition of
startup/stop.
Extraordinarily-high
temperature.
Possible
Overheating
inside the STP
control unit
70℃ or more
inside the STP
control unit.
"FAILURE" "CONTROLLER
OT"
"ALARM" The STP pump decelerates
and stops.
Failure in the cooling fan.
Shielding of cooling air
inlet and ventilation port.
Extraordinarily-high
temperature.
Possible
Overspeed Rotational
speed of the
STP pump:
51,400 rpm or
more.
"FAILURE" "OVERSPEED"
or
"DRIVER RA"
"ALARM" Breaker OFF.
Power failure state.
The STP pump stops.
Failure in the motor
driver.
Impossible