Inficon VGC083A - CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors - Convection Gauge

tinb29e1-c (2019-10) VGC083A_B.om 69
When using the Log-Linear convection gauge analog output mode (Log-Linear
1 - 8 V, 1 V/decade) for gases other than N
2
/ Air, use the following look-up table
and information to convert the analog output to pressure. The look-up table has
been derived from the equation provided in section 7.7
Analog Output for Log-Linear CG1 1-8V or CG2 1-8V
True
Pressure
(Torr)
N
2
Ar He O
2
CO
2
KR Freon12 Freon22 D
2
Ne CH
4
1.00E-4
1.000
1.000
1.000
1.000
1.000
1.000
1.000
1.000
1.000
1.000
1.000
2.00E-4
1.301
1.301
1.301
1.301
1.301
1.301
1.301
1.301
1.301
1.301
1.301
5.00E-4
1.699
1.699
1.699
1.699
1.699
1.477
1.699
1.699
1.699
1.699
1.699
1.00E-3
2.000
1.845
1.903
2.000
2.041
1.602
2.176
2.176
2.114
1.845
2.230
2.00E-3
2.301
2.146
2.204
2.301
2.362
2.000
2.491
2.491
2.380
2.176
2.519
5.00E-3
2.699
2.519
2.602
2.699
2.643
2.362
2.881
2.845
2.778
2.544
2.886
1.00E-2
3.000
2.820
2.908
2.987
3.041
2.681
3.167
3.130
3.083
2.851
3.185
2.00E-2
3.301
3.117
3.207
3.297
3.346
2.978
3.476
3.435
3.386
3.149
3.483
5.00E-2
3.699
3.511
3.607
3.692
3.740
3.371
3.860
3.839
3.778
3.542
3.888
1.00E-1
4.000
3.808
3.914
3.988
4.029
3.670
4.155
4.134
4.083
3.845
4.201
2.00E-1
4.301
4.100
4.217
4.288
4.322
3.960
4.439
4.418
4.398
4.149
4.498
5.00E-1
4.699
4.494
4.638
4.687
4.689
4.336
4.786
4.774
4.837
4.555
4.893
1.00E+0
5.000
4.778
4.973
4.987
4.978
4.602
5.021
5.017
5.190
4.872
5.204
2.00E+0
5.301
5.057
5.346
5.288
5.233
4.845
5.210
5.220
5.616
5.201
5.522
5.00E+0
5.699
5.389
6.130
5.697
5.524
5.107
5.389
5.418
7.391
5.719
5.877
1.00E+1
6.000
5.602
6.013
5.696
5.250
5.471
5.530
6.332
6.446
2.00E+1
6.301
5.763
6.348
5.819
5.360
5.521
5.571
7.766
7.550
5.00E+1
6.699
5.895
6.890
5.915
5.410
5.579
5.617
7.925
1.00E+2
7.000
5.946
7.320
5.966
5.438
5.670
5.691
2.00E+2
7.301
5.991
7.470
6.090
5.521
5.777
5.808
3.00E+2
7.477
6.053
7.580
6.228
5.555
5.838
5.876
4.00E+2
7.602
6.130
7.686
6.350
5.595
5.883
5.925
5.00E+2
7.699
6.207
7.781
6.458
5.624
5.918
5.964
6.00E+2
7.778
6.274
7.863
6.561
5.647
5.947
5.998
7.00E+2
7.845
6.338
7.934
6.664
5.667
5.974
6.029
7.60E+2
7.881
6.375
7.974
6.732
5.677
5.989
6.045
8.00E+2
7.903
6.400
7.999
6.774
5.685
5.998
6.057
9.00E+2
7.954
6.455
6.900
5.698
6.021
6.079
1.00E+3
8.000
6.512
7.045
5.706
6.045
6.104
Values listed under each gas type are in volts (V).
The gas in use is O
2
. Voltage output is 4.288 volts.
True pressure of O
2
is 2.00E-01 Torr
8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V
Analog Output Correction
Factors - Convection
Gauge
Example