EasyManua.ls Logo

Inficon VGC083A - 10.6 Maintenance

Inficon VGC083A
88 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
84 tinb29e1-c (2019-10) VGC083A_B.om
The values of filament voltage and current presented below are approximate
values that one may see in the Research Screen. The representative, average
values used in this table may vary depending on the condition of the filament,
length of ion gauge cable, and the vacuum chamber environment. The readings
taken should be viewed with the notion that there may be an indication of reaching
end-of-useful filament lifetime if the power required to sustain emission current
continues to increase over time.
Indication
Possible Cause
Possible Solution
Filament voltage values are present
for several seconds immediately
after turning IG ON, but then the
values are zero
Filament is contaminated or filament
has reached end-of-useful operating
life for required emission current
setting
Switch emission current setting from initial setting
and re-start the IG; make several attempts to
establish emission current at 100 μA, 4 mA or
10 mA.
Switch to second filament or replace ion gauge
sensor
All parameters in the RESEARCH
screen are zero after IG turn ON is
attempted
Failed electronics Replace or repair the VGC083
IG filament current is greater than
6.5 A
Filament nearing end-of-useful-
operating-life
Switch to second filament or replace ion gauge
sensor
IG filament voltage is greater than
16 V
Excessive voltage drop in ion gauge
cable
The ion gauge cable maybe too long, wire gauge
is too small or a defect in the cable or connectors
In general, maintenance is not required for your INFICON ion gauge module, con-
vection gauge and control unit. Periodic performance checks may be done by com-
paring the gauge to a known reference standard. When using the head in gases
containing contaminants or materials that react with the filaments of the hot
cathode ion gauge, periodic degas and switching to the alternate filament from
time-to-time is recommended for longest useable head lifetime. When the hot
cathode (filament) of the ionization gauge head is at or near end-of-life, head
(sensor) replacement is recommended.
For cleaning the outside of the unit a slightly moist cloth will usually do. Do not use
any aggressive or scouring cleaning agents.
10.6 Maintenance
Cleaning the VGC083

Table of Contents

Related product manuals