Inficon VGC083A - 10 Service; 10.1 Calibration & 10.2 Troubleshooting

tinb29e1-c (2019-10) VGC083A_B.om 81
10 Service
Every INFICON module is calibrated prior to shipment using nitrogen. Care should
be exercised when using gases other than nitrogen (N
2
) / air (see previous sections
regarding the use of gases other than N
2
/air).
Indication
Possible Cause
Possible Solution
Display on VGC083 controller indicates
OFF
No power Check cable connections and verify that
power is being supplied
The connector may not be wired
correctly
Check cable connections and verify that
power is being supplied
Readings appear very different from
expected pressure
Sensor not in the proper location on
vacuum system
The process gas is different from the gas
(Nitrogen) used to calibrate the IG
Ensure the sensor is located in
appropriate location on vacuum chamber
Apply gas correction factor if applicable
Sensor has been dropped causing
mechanical damage
Replace the ion gauge sensor tube
The gauge sensor tube is contaminated
Degas the sensor or replace the sensor
Leak in the vacuum system Re-check for leak in the system. Re-
check that all metal seals are used when
operating below 1.00 × 10
-7
Torr
Ion gauge cannot be turned on Pressure exceeds 1.00 × 10
-3
Torr at
0.10 mA (100 µA) emission current
Decrease pressure below required value
Pressure exceeds 5.00 × 10
-4
Torr at
4 mA emission current
Pressure exceeds 1.00 × 10
-4
Torr at
10 mA emission current
Decrease pressure below required value
Decrease pressure below required value
Emission Control not functioning Switch to the other filament, replace ion
gauge sensor tube due to possible fila-
ment failure or contamination
Research Screen shows filament voltage
is present but filament current stays at
0.00
Filament is open Switch to the other filament, replace
sensor or electronics
Research Screen shows filament voltage
and filament current are present but
gauge is shutting off
Filament is contaminated or burned out Switch to the other filament or replace
sensor
Unable to initiate degas System pressure above 5.00 × 10
-5
Torr Decrease pressure below the required
value
Voltage to filament too high Filament contaminated or near end of its
life
Switch to the other filament or replace
sensor
Setpoint does not actuate
Incorrect setup
Check setpoint setup
10.1 Calibration
10.2 Troubleshooting - IG
Operation