Inficon VGC083A - Convection Gauge

tinb29e1-c (2019-10) VGC083A_B.om 71
When using the Non-Linear convection gauge analog output mode for gases other
than N
2
/ Air, use the following look-up table and information to convert the analog
output to pressure. The look-up table has been derived from the equation provided
in section 7.9
True
Pressure
(Torr)
N
2
Ar He O
2
CO
2
KR Freon12 Freon22 D
2
Ne CH
4
0
0.3751
0.375
0.375
0.375
0.375
0.375
0.375
0.375
0.375
0.375
0.375
1.00E-4
0.3759
0.3757
0.3755
0.376
0.376
0.3755
0.376
0.376
0.376
0.3757
0.3766
2.00E-4
0.3768
0.376
0.3765
0.377
0.377
0.3768
0.378
0.378
0.377
0.3763
0.378
5.00E-4
0.3795
0.378
0.379
0.38
0.381
0.3772
0.382
0.381
0.381
0.3782
0.3825
1.00E-3
0.384
0.381
0.382
0.384
0.385
0.379
0.388
0.388
0.386
0.381
0.3896
2.00E-3
0.3927
0.387
0.389
0.392
0.395
0.384
0.401
0.4
0.396
0.388
0.403
5.00E-3
0.4174
0.403
0.409
0.417
0.412
0.395
0.437
0.432
0.425
0.405
0.438
1.00E-2
0.4555
0.429
0.441
0.453
0.462
0.415
0.488
0.48
0.47
0.433
0.492
2.00E-2
0.5226
0.477
0.497
0.521
0.536
0.451
0.581
0.566
0.549
0.484
0.584
5.00E-2
0.6819
0.595
0.637
0.679
0.705
0.544
0.778
0.764
0.727
0.608
0.796
1.00E-1
0.878
0.745
0.814
0.868
0.9
0.668
1.009
0.99
0.944
0.768
1.053
2.00E-1
1.1552
0.962
1.068
1.141
1.179
0.847
1.315
1.291
1.265
1.002
1.392
5.00E-1
1.6833
1.386
1.589
1.664
1.668
1.194
1.826
1.805
1.914
1.469
2.014
1.00E+0
2.2168
1.818
2.164
2.195
2.172
1.536
2.257
2.247
2.603
1.976
2.632
2.00E+0
2.8418
2.333
2.939
2.814
2.695
1.921
2.647
2.666
3.508
2.631
3.313
5.00E+0
3.6753
3.028
4.387
3.672
3.316
2.429
3.029
3.09
5.059
3.715
1.00E+1
4.2056
3.48
5.774
4.225
3.67
2.734
3.204
3.33
6.361
4.605
4.699
2.00E+1
4.5766
3.801
7.314
4.62
3.903
2.966
3.308
3.414
5.406
5.172
5.00E+1
4.8464
4.037
4.916
4.071
3.075
3.43
3.509
6.159
5.583
1.00E+2
4.9449
4.122
5.026
4.154
3.134
3.618
3.66
6.483
5.72
2.00E+2
5.019
4.192
5.106
4.336
3.269
3.827
3.883
6.661
5.86
3.00E+2
5.1111
4.283
5.2
4.502
3.384
3.938
4.005
6.726
4.00E+2
5.2236
4.386
5.315
4.621
3.466
4.016
4.088
6.767
6.103
5.00E+2
5.3294
4.477
5.422
4.708
3.526
4.076
4.151
6.803
6.00E+2
5.4194
4.55
5.515
4.775
3.573
4.124
4.203
6.843
6.342
7.00E+2
5.4949
4.611
5.592
4.83
3.613
4.166
4.247
6.89
7.60E+2
5.534
4.643
5.633
4.86
3.632
4.19
4.271
6.92
8.00E+2
5.5581
4.663
5.658
4.877
3.645
4.203
4.286
6.942
6.519
9.00E+2
5.6141
4.706
5.713
4.919
3.674
4.237
4.321
7
1.00E+3
5.6593
4.745
5.762
4.955
3.69
4.27
4.354
7.056
6.642
Values listed under each gas type are in volts (V (dc)).
8.3.3.3 CG1 NON-LIN or CG2
NON-LIN Analog Output
Correction Factors -
Convection Gauge