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Inficon VGC083A - Table of Contents

Inficon VGC083A
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4 tinb29e1-c (2019-10) VGC083A_B.om
Contents
Product Identification 2
Validity 2
Important User Information 2
Liability and Warranty 3
1 Introduction / General Information 6
1.1 VGC083A 6
1.2 VGC083B 7
2 Technical Data 8
3 Important Safety Information 11
3.1 Safety Precautions - General 11
3.2 Safety Precautions - Service and Operation 11
3.3 Electrical Conditions 13
3.3.1 Proper Equipment Grounding 13
3.3.2 Electrical Interface and Control 13
3.4 Overpressure and use with hazardous gases 13
3.5 Gases other than Nitrogen / air 14
4 Installation 15
4.1 Mechanical Installation - Controller 15
4.1.1 Panel Mount 15
4.1.2 Rack Mount 15
4.1.3 Mechanical Installation - Ionization Gauge 17
4.1.4 Mechanical Installation - Convection Gauge 17
4.2 Electrical Installation 18
4.2.1 Grounding 18
4.2.2 Installation 19
4.2.3 Connecting the Ionization Gauge Cable 19
4.2.3.1 Standard Nude, Glass and Mini IG Cables 20
4.2.3.2 Bakeable Nude IG Cable 21
4.2.3.3 Standard nude IG Cable Connector Pin Out 22
4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 23
4.2.5 Power Connection 24
4.2.6 Relay Connection 24
4.2.7 Analog Output Connection 24
4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 24
4.2.9 Digital I/O Connection 25
4.2.10 RS232 / RS485 Serial Communications Connection 26
5 Operation - IG and CG 28
5.1 IG Emission Current 28
5.2 IG Degas 28
5.3 IG Filament Material Selection / Venting the Chamber 28
5.4 IG Over Pressure Shut Down 29
5.5 IG Over Temperature Shut Down 30
5.6 Convection Gauge (CG) Initial Setup 30
6 Setup and programming 31
6.1 Applying Power 31
6.2 Front Panel Display 31
6.3 User Interface Basics 32
6.4 Factory-Set Default Parameters 32
6.5 Programming 34
6.5.1 SETUP UNIT 35
6.5.2 ION GAUGE 36
6.5.3 CONVEC GAUGE 41
6.5.4 RELAYS 42
6.5.5 Analog Output 44
6.5.6 SERIAL COMM 49
6.5.7 DISPLAY 49

Table of Contents