3-16
Keysight B1500A Configuration and Connection Guide
Connection Guide for Wafer Prober
SCUU and ASU
3.4 SCUU and ASU
This section describes how to connect a wafer prober to the Keysight B1500A
semiconductor device analyzer with SCUU and ASU.
3.4.1 SCUU positioner-based probing connection
The SCUU should be connected to the DUT by using triaxial cables as shown in Figure
3-17. When making IV measurements using the SMUs, the outputs of the SCUU functi
on
exactly the same as
the Kelvin outputs of an SMU (both FORCE and SENSE
lines are
available).
NOTE In the Figure 3-17, SENSE lines are not used. When making CV measurements using the
MFCMU, only the FORCE outputs of the SCUU are used. SCUU FORCE output 1
corresponds to CMH, and SCUU FORCE output 2 corresponds to CML. The SCUU can be
fixed on the prober by using SCUU Magnet Stand (N1301A-110).
Figure 3-17 Example of a SCUU remote docking mode
Table 3-7 Item number information for ASU connection with B1500A
Description Qty Product Number Part number
SMU CMU unify unit (SCUU) 1 N1301A-100 N/A
SMU CMU unify unit Cable (3 m) 1 N1301A-102 N/A
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