Keysight B1500A User’s Guide, Ed ition 14 3- 19
Installation
Installing Accessories
To connect
MFCMU/4284A/
E4980A to AUX
Perform the following procedure to connect the MFCMU or the 4284A/E4980A.
See Figure 3-2 and Figure 3-3.
Prepare a shorting bar furnished with the ASU. The shorting bar is effective for
reducing the offset capacitance caused by connecting a measurement terminal to the
chuck of a wafer prober.
1. Turn the instrument off.
2. Prepare two ASUs (#1 and #2) and two shorting bar. And perform the following
procedure for each ASU.
a. Disconnect the triaxial cable from the ASU if it is connected to the ASU
Force terminal.
b. Face the concave side of the shorting bar to front.
c. Slide the shorting bar from the right side of the connectors.
3. Connect the cable to the instrument. For the MFCMU, use the N1300A CMU
cable. For the 4284A/E4980A, use the 16048D/E test leads. It is ok to leave
open the ground wire extended from the cable.
4. Connect the high potential (Hp) cable of the test leads to the ASU #1 CMU-pot
terminal.
5. Connect the high current (Hc) cable to the ASU #1 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #1 by the step 5 and 6.
6. Connect the triaxial cable from the SMU #1 Force terminal to the ASU #1 Force
terminal.
7. Connect the low potential (Lp) cable to the ASU #2 CMU-pot terminal.
8. Connect the low current (Lc) cable to the ASU #2 CMU-cur/AUX In terminal.
The shorting bar is fixed to the ASU #2 by the step 8 and 9.
9. Connect the triaxial cable from the SMU #2 Force terminal to the ASU #2 Force
terminal.
10. Prepare the connection wire (both pin terminals) furnished with the ASU and
connect it between the CMU Return terminals of the ASU #1 and ASU #2
together.
NOTE
About ASU output cables
To perform capacitance measurements accurately, the cable length between DUT
and the ASU output must be as short as possible.
To Next Page
Loading...
Need help?
General
