Keysight U1271A - Figure 2-18 Measuring Leakage Current

Making Measurements 2
Using Smart Ω for Resistance Measurements (U1272A only)
U1271A/U1272A User’s Guide 79
Use Smart Ω to measure leakage current
Use the Smart Ω function to measure leakage current or
reverse current for junction diodes. Such leakage currents
are negligible, and are usually measured in units of μA or
nA. Instead of having to source a high precision multimeter
with 1 nA or 0.1 nA or a precision shunt, you can measure
the leakage current using the Smart Ω function with just a
resistor from 100 kΩ to 300 kΩ.
Figure 2-18 Measuring leakage current
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