LEYBOLD LEYSPEC view Series - Page 52

300781172_002_C0 - 012/2019 - © Leybold 52
Maintenance
11.2.1 Replace the Ion Source (LEYSPEC view models)
1. Loosen the M2 screw to remove the wiring clamp band of the Q-pole.
2. Loosen the M2 screw on top of the ion source to remove the FIL1, FIL2, FIL C,
GAUGE and GRID wiring.
3. Loosen the M2 screw to remove the ion source.
4. Install a new ion source and fix it to the Q pole using the M2 screw.
5. Fix the FIL 1, FIL 2, FIL C, GAUGE and GRID wiring with M2 screw.
6. Fix the wiring using the wiring fixing band.