LEYBOLD LEYSPEC view Series User Manual

53 300781172_002_C0 - 01/2019 - © Leybold
Maintenance
Fig. 11.1 Pin assignment as viewed from atmospheric side (LEYSPEC view)
7. Check continuity and insulation according to Install the analyzer tube on
page 22.
11.2.2 Replace the filament (LEYSPEC ultra models)
1. Loosen the M2 screws (A) of the FIL1, FIL2 and FIL.C joints using a small
screwdriver and remove the terminals from the hermetic seal.
2. Remove the two M2 screws (circled) from the ion source post using a small
screwdriver.
LEYSPEC view
1FIL1
2Grid
3FIL2
4FIL.C
5RF
6HV
7RF
8 IC (SEM/FC)
9 IC (FC) LEYSPEC view
10 TP

LEYBOLD LEYSPEC view Series Specifications

General

Brand	LEYBOLD
Model	LEYSPEC view Series
Category	Measuring Instruments
Language	English