LEYBOLD LEYSPEC view Series - Page 54

300781172_002_C0 - 012/2019 - © Leybold 54
Maintenance
3. Remove the filament unit from the ion source.
4. Set a new filament and fix it to the ion source using the M2 screws.
5. Reattach FIL1, FIL2 and FIL.C to the terminals and reattach to the hermetic
seal.
Fig. 11.2 Pin assign of atmospheric side view