LEYBOLD LEYSPEC view Series - Page 55

55 300781172_002_C0 - 01/2019 - © Leybold
Maintenance
6. Check continuity and insulation according to Install the analyzer tube on
page 22.
11.2.3 Replace the ion source (LEYSPEC ultra models)
1. Loosen the M2 screws (A) of the FIL1, FIL2 and FIL.C joints.
2. Loosen the M2 screws (circled) to remove the GRID, FOCUS and GAUGE
wiring from the ion source.
3. Remove two M2 screws to remove the ion source. See Figures (3) and (4).
LEYSPEC ultra
1N.C.
2FIL.C
3RF2
4FOCUS
5N.C.
6HV
7FIL2
8FIL1
9TP
10 N.C.
11 GRID
12 RF1