65 300781172_002_C0 - 01/2019 - © Leybold
Maintenance
4. Start measurement and confirm the ion current generated by the flowing gas.
5. Estimate the sensitivity as follows:
The standard sensitivity is 1 - 7A/Pa (for example, an N
2
gas inlet pressure of 5 x
10
-4
Pa gives an ion current of 5 x 10
-11
A).
If the sensitivity is lower than the specification, try degassing.
(Degas is cleaning function which removes deposition from surface of electrode by
colliding high energy thermal electrons.) If the sensitivity is not improved after
degassing, consider exchanging the ion source.
)(Pr
)(
)/(
PaessureGas
AIonCurrent
PaAySensitivit
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