300781172_002_C0 - 012/2019 - © Leybold 66
Maintenance
6. Degas
When using the degas function, the pressure at sensor should be as low as
possible.
(Under 1 x 10
-4
Pa recommended)
Create degas recipe and operate it.
Mode = Slow
Output = 50%
Time = 1 Hour
7. Check the sensitivity again after degassing. If after degassing, the ion current is
below 1 x 10
-7
A/Pa by more than one order of magnitude, consider degassing for
a longer time with a greater current or consider replacing the ion source.
NOTICE:
During a normal degassing operation, 100% of the degas power corresponds to
5.0 mA of emission current, 50% to 2.5 mA, and 10% to 0.5 mA. However, if there
are many deposits then the thermal electron stream will be unstable and stop and
the emission current will indicate 0.0 mA as shown below in the figure. In this case,
the PC will not give an error message, and the remaining time progresses as with
a normal operation. Repeat the degassing operation to fully degas the ion source.
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