67 300781172_002_C0 - 01/2019 - © Leybold
Maintenance
11.3.5 Calibrate total pressure measurement
Procedure:
1. Flow gas into the sensor until target pressure. After that, start measurement and
confirm total pressure.
2. Calculate the coefficient.
Coefficient = vacuum gauge [Pa] / total pressure of the RGA [Pa]
3. From the Sensor menu, select TP coefficient setting.
Purpose: Correct the total pressure measurement by calculating a correction coefficient
using the chamber vacuum gauge.
Cycle: Whenever you exchange ion source or sensor.
To Next Page
Loading...
