77 300781172_002_C0 - 01/2019 - © Leybold
Troubleshooting
Measurement value fluctuates
Contaminated analyzer tube
or extremely low sensitivity.
Change the analyzer tube with another one and
check symptom. If OK with another one, the problem
is in the sensor head.
Line voltage is fluctuating. Check line voltage using a circuit tester or other (line
voltage: 24 V d.c. ± 10%).
Ground potential is
fluctuating.
Check the sensor unit ground and the ground where
the analyzer tube is connected using a circuit tester
or an oscilloscope.
Strengthen the ground wiring or take measures such
as installing either sensor unit or analyzer tube with a
floating ground.
Leakage current is generated
because of poor insulation
between electrodes of the
analyzer tube.
Check insulation between the electrodes and the
outside wall using a circuit tester. (Indication should
be infinite or more.)
If there is poor insulation, ship the analyzer tube back
for repair.
Operating environment
temperature is varying.
Measure at a constant temperature.
RF voltage tuning is out of
alignment.
Regulate RF voltage tuning.
High intensity magnetic field
is generated by surrounding
equipments.
The orbit of thermions generated from the filament is
affected by intense magnetic field around the ion
source, causing the emission current to fluctuate.
Eliminate the intense magnetic field environment.
Mass number calibration is
not correct.
Recalibrate mass number using the included
software.
No set-point signal output
In the LOCAL mode, set-
point is not output.
Actuate the set-point with the included software.
Erroneous wiring or open
circuit of EXT-I/O connector.
Correct the wiring and check continuity using a
circuit tester or other.
Failure of output circuit. See your closest Leybold representative for repair
and inspection.
No interlock signal output
Erroneous wiring or
disconnection of EXT I/O
connector.
Correct the wiring and check continuity using a
circuit tester or other.
Photocoupler current is too
low or cannot be fed.
Current of 10 mA is fed to the photocoupler
inside.When an external power supply is used, check
if the current capacity is sufficient and if the wiring
resistance of the wiring is high. When it is turned on
and off with a relay, make sure that the minimum
actuating current of the relay is 10 mA or less.
Failure of input circuit. See your closest Leybold representative for repair
and inspection.
Value on the sensor unit differs from
that in the software
Sensitivity is not calibrated
correctly.
Recalibrate mass number using the software.
Recipe setting is not correct
in the included software.
Refer to
Front panel operation on page 31.
Error Cause Remedy
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