Operation
56
300554859_002_C0 - 11/2016 - © Leybold
Function pressure dependent switch-on of the turbo pump
■
Turbomolecular pump off
■
Turbomolecular pump starts with Start signal
■
Turbomolecular pump starts depending on the pressure
(measured value from gauge head at X101)
■
Turbomolecular pump starts depending on the pressure
(measured value from gauge head at X102)
When this function has been enabled, the pump will behave as shown in the diagram:
the pump starts when a start command is present and the pressure has dropped below
the limit.
Adjustable parameter: frequency limit
Revoking the start command stops the turbomolecular pump.
This function is suited for triggering on the forevacuum pressure. The turbomolecular
pump will only start, provided, a certain pressure level has been attained by the backing
pump in the forevacuum line.
Obere Grenze
Zustandsdiagramm für Funktionscode 25
Power Fail aktiv
Ausgang
Untere Grenze
f
Verzögerungszeiten = 0
Druck
Untere
Druckgrenze
Pumpe Start
Startbefehl
Function pressure dependent switch-on
Start command
Pump start
Lower
pressure limit
Pressure
Delay times = 0
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