Operation
55
300554859_002_C0 - 11/2016 - © Leybold
Functions 24VDC Output backing pump (X206, X210, X211)
Function
code Function
40/41 pressure dependent Functions for starting the turbomolecular pump
■
Backing pump off
■
Backing pump starts with Start signal
■
Backing pump starts depending on the pressure
(measured value from vacuum gauge head at X101)
■
Backing pump starts depending on the pressure
(measured value from vacuum gauge head at X102)
When the start command is present, the backing pump starts. When the turbomolecu-
lar pump has entered its normal operating mode, and if the pressure drops below the
preset pressure level, then the backing pump will stop.
Adjustable parameter: frequency limit high
Adjustable parameter: frequency limit low
When the pressure exceeds the pressure level then the backing pump will start and will
stop again when the turbomolecular pump has entered normal operation and the pres-
sure has dropped below the pressure threshold.
In case of a Stop command, both backing pump and turbomolecular pump will stop.
This function is suited for triggering on the high vacuum pressure. The backing pump
will only be operated when necessary.
This function will intervene only provided the turbomolecular pump is in its normal oper-
ating mode.
Obere Grenze
Untere Grenze
Startsignal
Druck
Ausgang
Drehzahl
Normal Op.
State diagram pressure dependent (40/41)
Output
Upper limit
Lower limit
Start signal
Pressure
Speed
Normal op.
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