MKS 670B - Page 153

Performance Specifications A
pp
endix A: Product S
p
ecifications
138
Performance Specifications (Continued)
Display and Digital Communications
Accuracy
Zero
±
Span
±
Update Rate
Linearity
0 to 10 Volts
0 to -10 Volts
Pressure Units
Temperature Coefficient
Zero
Span
±
50 ppm F.S.
±
200 ppm F.S.
4 times per second (every 0.25 seconds)
<
±
15 ppm of F.S.
<
±
50 ppm of F.S.
Torr, mmHg, mbar, Pa, kPa, psi, inHg, inH
2
O,
cmH
2
O, % of Full Scale, ppm, mTorr
1 ppm/° C
25 ppm/° C
CE Compliance
Electromagnetic Compatibility
2
Low-Voltage
Product Safety and Liability
Installation Category
Pollution Degree
Electromagnetic Compatibility Directive 89/336/EEC
Low-Voltage Directive 73/23/EEC
Product Safety Directive 92/59/EEC
II, according to EN 61010-1
2, according to IEC 664
2
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
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