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MKS 670B - Table 16: Relationship between Averaging Entry and Calibration Times

MKS 670B
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Chapter Five: Operation How To Calibrate the 670 Instrument
73
Relationship Between Averaging Entry and Calibration Times
Averaging Entry: 20 40 60 80 100
Null 17 sec. 24 sec. 32 sec. 40 sec. 49 sec.
F.S. 9 sec. 13 sec. 17 sec. 20 sec. 24 sec.
Zero 21 sec. 30 sec. 39 sec. 50 sec. 1 min.
Table 16: Relationship Between Averaging Entry and Calibration Times
Refer to
Averaging
, page 51, for more information.
6. Press the [
CAL
] key to enter the calibration menu.
7. Repeatedly press either arrow key ( [
] or
[ ] ) to scroll to the null screen.
NULL -0.0001 Volts
Press ENTER to cal
8. Press the [
ENTER
] key to initiate the null calibration routine.
This step may take several minutes to complete, depending upon the averaging entry.
Refer to Table 16 for an approximate time. The message “
CALIBRATING
” will flash
on the display until the calibration procedure is complete. The reading should go to
0.000
±
0.0005. If the reading does not approach 0.000, press the [
ENTER
] key again to
repeat the null calibration routine.
9. Repeatedly press either arrow key ( [
] or
[ ] ) to scroll to the full scale screen.
FS: 9.99998 Volts
Press ENTER to cal
10. Press the [
ENTER
] key to initiate the full scale (FS) calibration routine.
The message “
CALIBRATING
” will flash on the display during the calibration process.
The reading should go to 10.000
±
0.0005. If the reading does not approach 10.000, press
the [
ENTER
] key again to repeat the F.S. calibration routine.
11. Pump down the system to a pressure less than the resolution of the pressure transducer.
To achieve a proper zero, the pressure of the system must be
less
than
the resolution of
the pressure transducer used to measure the system pressure. The transducer will not be
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