MKS 670B - Appendix A: Product Specifications; Performance Specifications

Appendix A: Product Specifications Performance S
p
ecifications
137
Appendix A: Product Specifications
All specifications are at 23° C, 120 VAC
Performance Specifications
Ranges x1, x0.1, and x0.01 of full range of the pressure
transducer
Analog Signal Output
Voltage available at rear
±
connector
Impedance
Temperature Coefficient
(x1 range)
±
Zero
±
Span
Accuracy
1
±
Zero
x1
±
x0.1
±
x0.01
±
±
Span
x1
±
x0.1
±
x0.01
±
Linearity
0 to +10 Volts
±
0 to -10 Volts
±
Noise
0.01 - 0.4 Hz
1 kHz - 1 MHz
0 to
±
10 V on each range (x1, x0.1, x0.01),
into >10K ohm load
<1 ohm
±
4 ppm of range/° C (without calibration)
±
25 ppm of range/° C (without calibration)
±
15 ppm of range/° C (with full scale calibration)
±
100 ppm of range F.S.
±
100 ppm of range F.S.
±
200 ppm of range F.S.
±
300 ppm of range F.S.
±
350 ppm of range F.S.
±
800 ppm of range F.S.
<
±
25 ppm F.S.
<
±
50 ppm F.S.
< 70 µVolts peak-to-peak, on the x1 and x0.1 ranges
< 350 µVolts peak-to-peak, on the x0.01 range
<4 mV peak-to-peak, on all ranges
1
Includes non-repeatability
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