EasyManua.ls Logo

MKS Granville-Phillips Mini-Convectron 275 series - Replacing a Convectron Gauge Tube; Baking the Vacuum Chamber with the Mini-Convectron Gauge Attached

MKS Granville-Phillips Mini-Convectron 275 series
68 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
6 Service and Maintenance
63
Series 275 Mini-Convectron Module with DeviceNet
Instruction Manual - 275563
6.4.6 Replacing a Convectron Gauge Tube
If the gauge tube must be replaced, follow the procedures in Section 6.4.2 through Section 6.4.3 to
remove the gauge tube.
Note: To avoid contaminating the Convectron gauge, wear sterile gloves during the removal and
replacement procedure.
1. Install the replacement gauge tube and reassemble the module.
2. Install the module onto the vacuum chamber and check it for proper operation.
6.4.7 Baking the Vacuum Chamber with the Mini-Convectron Gauge Attached
1. To remove the electronics module from the Convectron gauge, follow the instuctions provided
in Section 6.4.3.
2. Bake the process chamber at the desired temperature for the desired time. The Convectron
gauge tube must not exceed 150
o
C.
3. Allow the system to cool to ambient temperature and reconnect the module electronics.
4. Connect the cables to the Mini-Convectron Module.
Figure 6-5 Add and Drain Solvent to Clean a Convectron Gauge
The temperature of the Mini−Convectron Module eleltronics must not exceed
85
o
C (185
o
F). The electronics module must be removed from the vacuum
chamber before baking the chamber at temperatures higher than 85
o
C.
Bakeout temperature of the Convectron Gauge, with the electronics removed,
must not exceed 150
o
C (302
o
F).
To avoid shock, turn OFF electrical power before servicing the
Mini−Convectron Module. Do not touch any gauge pins while the gauge is
under vacuum.
Fill Position
Drain Position
Add Solvent

Table of Contents

Other manuals for MKS Granville-Phillips Mini-Convectron 275 series

Related product manuals