4 Assembly
32
IC Inspection Microscope ECLIPSE L200ND / L200N Instructions
4.3 System diagram
b
L stage for MWL860
L stage P for MWL860
8 x 8 stage
8 inch wafer holder
6 inch wafer holder
Mask holder
(For diascopic illumination,
up to 6 inch holder)
L3N-FIAD
(for L200ND)
C-HGFIE
K CFIUW
10X
K CFIUW
10XM
K CFI
10X
K CFI
12.5X
K CFI
15X
K CFI
10XM
ND, NCB, GIF filter Pinhole Polarizer
Analyzer
Ultrawide
Trinocular Tilting
Eyepiece Tube
L2-TT2/L2-TT2A
DIC slider
Micrometer eyepiece
Ultrafine
motion unit
LV-LH50PC
12V50W
lamphouse
LV-HL50W
12V50W-LL
lamp
12V50W
lamp
Direct C-mount adapter
LV-TV TV adapter
C-mount
adapter
0.55x
L200N/L200ND
Breath shielding plate
C-HGFIF15/30
DS-L2
DS-U2
PC
a
RS232C
USB
• Setup Tool (SDK, Setup)
• NIS-Elements
USB
TV camera adapter
TV camera lens
(For 1x relay lens: 1x relay lens N)
Adapter
V-T photo adapter
b
a
* For diascopic illumination, L200ND only
Trinocular Tube
LV- TI
Figure-38 System diagram
To Next Page
Loading...
