X
Y
Z
DATA
Z LIMIT
COUNT
FULL
HALF
TRACK
SHOT
COARSE EPI DIA FN
FINE
AF FOCUS LED
X
Y
Z
DATA
Z LIMIT
COUNT
FULL
HALF
TRACK
SHOT
COARSE EPI DIA FN
FINE
AF FOCUS LED
X
Y
Z
DATA
Z LIMIT
COUNT
FULL
HALF
TRACK
SHOT
COARSE EPI DIA FN
FINE
AF FOCUS LED
X
Y
Z
DATA
Z LIMIT
COUNT
FULL
HALF
TRACK
SHOT
COARSE EPI DIA FN
FINE
AF FOCUS LED
76
Inputting the measured value of X-axis
1. Press the X-RESET button
c
to show ”3” in the display X.
2. Press the DATA button
f
to change the digit you want to edit
in the display Y.
3. Press the Y-RESET button
d
or the Z-RESET button
e
to set the
display Y to "Measured value" of "X-axis" described in Certificate
of Accuracy (provided with the stage).
4
Inputting the measured value of Y-axis
1. Press the X-RESET button
c
to show ”6” in the display X.
2. Press the DATA button
f
to change the digit you want to edit
in the display Y.
3. Press the Y-RESET button
d
or the Z-RESET button
e
to set the
display Y to "Measured value" of "Y-axis" described in Certificate
of Accuracy (provided with the stage).
7
Setting the Y-axis counting direction
1. Press the X-RESET button
c
to show ”4” in the display X.
2. Press the Y-RESET button
d
or the Z-RESET button
e
to set
the Y-axis counting direction in the display Y.
} For setting values, see "2 Setting Function List" (page 79).
5
Inputting the standard value of Y-axis
1. Press the X-RESET button
c
to show ”5” in the display X.
2. Press the DATA button
f
to change the digit you want to edit
in the display Y.
3. Press the Y-RESET button
d
or the Z-RESET button
e
to set
the display Y to "Standard value" of "Y-axis" described in Certificate
of Accuracy (provided with the stage).
6
c
c
d
d
e
e
f
f
c
d
e
c
d
e
f