39
ZN
System Manual
Section 3 BASIC KNOWLEDGE OF CLEAN SENSING SYSTEMS
Section 3
Feedback Control
• Constant feedback
The air volume level is altered so that the cleanliness stabilizes at the target value.
This feedback method is effective in environments with relatively little change since the
cleanliness is maintained at the bare minimum air volume level.
<Feedback Operation>
The air volume level is switched in stages according to the change in the amount of
particles.
The controlled air volume level never falls below the lower power air volume level.
Set the bare minimum air volume level as the lower power air volume level.
(1) The air volume level is
increased a level when the
target cleanliness is about
to be exceeded.
(2) The air volume level is
lowered a level when the
amount of particles is at a
fixed level or below.
Amount of particles
Target cleanliness
Low power air volume level
Feedback cycle
Time
Time
[Feedback Cycle]
• In a multi-clean sensing system:
The feedback cycle can be set on the Interface Unit.
• In a direct clean sensing system:
The feedback cycle equals the "measurement time x 16"
of the Air Particle Sensor.
(3) The air volume level is
increased a level again
when the target cleanliness
is about to be exceeded.
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