Omron ZN-A Series User Manual

69
ZN
System Manual
Section 4 APPENDICES
Section 4
INDEX
INDEX
A
Accessories
List of Products 66
Air Clean Unit 3
Dimensions 53
Error Messages 51
Indicator 48
List of Products 66
Maintenance 48
Specifications 54
Air Particle Sensor 3
Dimensions 57, 59
Error Messages 52
Flow of processing 41
List of Products 67
Maintenance 48
Specifications 58, 60
Automatic adjustment of air
volume level 4
Automatically Adjusting the Air
Volume Level 18
C
Calculating Unit
Dimensions 62
Specifications 62
Clean Monitoring System 2, 15
List of Products 67
Specifications 65
Cleaning notice indicator 49
Cleaning warning indicator 49
Cleanliness 45
Cleanliness Class of Multiple
Processes 5
Cleanliness of Multiple Processes
31
Constant feedback 23, 39
D
Dimensions
Air Clean Unit 53
Air Particle Sensor 57, 59
Calculating Unit 62
Interface Unit 63
Ionizer Unit 55
Direct Clean Sensing System
System Configuration 7, 36
Dust Removal and Static
Neutralization 6, 10
E
Electrostatic Sensor 10
Error Messages 51
Exclusive Monitoring Software
Exiting 17
Installing 16
Operating Environment 15
Starting Up 17
Uninstalling 16
F
Feedback 4, 8, 9, 36
Flow of data
Direct Clean Sensing System 40
Multi-clean Sensing System 42
Flow of Operations for Upgrading
the System 14
I
Interface Unit
Connector Pin Arrangement 64
Dimensions 63
Error Messages 52
Example with Personal Computer
64
Exclusive Monitoring Software 17
Flow of processing 43
Ion Balance Sensor 6
Ionizer Unit 3
Dimensions 55
Error Messages 51
List of Products 66
Maintenance 49
Specifications 56
L
Logging 4, 7, 9, 25
M
Main Applications 3
Monitoring
Amount of Particles 4, 25
Charged Amount 6
Multi-Clean Sensing System
How Feedback Control Works 42
System Configuration 11, 37
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Omron ZN-A Series Specifications

General

Brand	Omron
Model	ZN-A Series
Category	Accessories
Language	English