4
Section 1 FEATURES
ZN
System Manual
Section 1
What is the "Clean Sensing System?"
Features of the Clean Sensing System
■ Feedback-based Automatic Adjustment of Air Volume
The air volume level of the Air Clean Unit can be automatically controlled based on the
amount of particles measured by the Air Particle Sensor. The cleanliness class in clean
booths can be maintained at the optimum air volume level in proportion to the amount of
particles from rapid air feed through to fine air volume operation in the power saving mode.
Setting Method p.18
■ Monitoring/Logging the Amount of Particles
The cleanliness class inside clean booths can be verified and ascertained by the amount of particles
per unit volume. The amount of particles can be verified on the Sensor and the Amplifier Unit.
Measured values can be easily logged on a personal computer using Interface Units and the
exclusive monitoring software (Realtime Clean Air Monitor). Changes in the amount of particles
over time observed in this way can be made use of as data for improving product quality.
Setting Method p.25
OPE1
OPE2
OPE3
1feature.fm4ページ２００７年６月２８日 木曜日 午前９時１７分
To Next Page
Loading...
Need help?
General
