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System Manual
Section 2 UPGRADING THE SYSTEM
Section 2
Setup Methods Suited to Specific Applications
Detecting the Cleanliness of Multiple Processes
The cleanliness of multiple processes can be verified at each individual process by
multiple Air Particle Sensors and multiple Air Clean Units. The air volume level also can
be controlled on individual equipment or booth (area).
The following describes an example where the cleanliness of multiple processes is
controlled.
1. Installing the Exclusive Monitoring Software
Install the software (exclusive monitoring software) on the personal computer beforehand.
Installing the Exclusive Monitoring Software p.15
4. Checking system operation
p.32
p.32
5. Setting the feedback conditions
1. Installing the Exclusive
Monitoring Software
p.32
p.31
3. Connecting peripheral devices
p.32
2. Setting the ID of the Air
Clean Unit
n units connected
m units connected
n: max. 9 units
m: max. 10 units
1ch2chnch 3ch
1ch2ch3chmch
2sysup.fm31ページ2007年6月28日 木曜日 午前9時17分