vii
ZN
System Manual
Introduction
CONTENTS
Introduction
CONTENTS
CONTENTS
Precautions for Safe Use iv
Editor's Note v
Page Format v
Notational Conventions vi
CONTENTS vii
Section 1 FEATURES 1
What is the "Clean Sensing System?" 2
System Features 2
Features of the Clean Sensing System 4
System Configuration Examples 7
Direct Clean Sensing System 7
Multi-Clean Sensing System 11
Section 2 UPGRADING THE SYSTEM 13
Before Upgrading the System 14
Flow of Operations for Upgrading the System 14
Installing the Exclusive Monitoring Software 15
Setup Methods Suited to Specific Applications 18
Automatically Adjusting the Air Volume Level 18
Monitoring/Logging the Amount of Particles 25
Detecting the Cleanliness of Multiple Processes 31
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