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Omron ZN-A Series User Manual
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7
ZN
Syst
em Ma
nual
Section
1
FEATURES
Section 1
System Configuration Examples
System Configuration Examples
Direct Clea
n Sensin
g System
■
Data Logging
Z
N
-
S
F
1
1
Air Particle Sensor
Interface
Unit
Realtime
Clean Air
Monitor
ZN-PD03
S
ensor
Amplifier
Unit
DC power supply
[Features]
• Monitoring/Logging the
Amount of Particles
ZN-PDA1
1
Clean Monitoring System
ZN-SFW1
1
For details on settings, see p.25.
1featur
e.fm7
ページ
２００
７年６
月２８
日 木
曜日
午前
９時１
７分
16
18
Table of Contents
Default Chapter
7
Editor's Note
7
Notational Conventions
8
Table of Contents
9
Contents
10
Section 1 FEATURES
11
What Is the "Clean Sensing System
12
System Features
12
Features of the Clean Sensing System
14
System Configuration Examples
17
Direct Clean Sensing System
17
Multi-Clean Sensing System
21
Section 2 UPGRADING the SYSTEM
23
Before Upgrading the System
24
Flow of Operations for Upgrading the System
24
Installing the Exclusive Monitoring Software
25
Setup Methods Suited to Specific Applications
28
Automatically Adjusting the Air Volume Level
28
Monitoring/Logging the Amount of Particles
35
Detecting the Cleanliness of Multiple Processes
41
Section 3 BASIC KNOWLEDGE of CLEAN SENSING SYSTEMS
45
Feedback Control
46
What Is "Feedback
46
How Feedback Control Works
50
Clean Sensing
54
Principle of "Particle Count
54
What Is "Cleanliness
55
Section 4 APPENDICES
57
Maintenance
58
Troubleshooting
60
Error Messages and Countermeasures
61
Specifications and Dimensions
63
List of Products
76
Index
79
Revision History
82
Other manuals for Omron ZN-A Series
Instruction Sheet
2 pages
4
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Omron ZN-A Series Specifications
General
Brand
Omron
Model
ZN-A Series
Category
Accessories
Language
English
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