6
Section 1 FEATURES
ZN
System Manual
Section 1
What is the "Clean Sensing System?"
■ Simultaneous Dust Removal and Static Neutralization
The Ionizer Unit ZN-J series, the first in industry to be added on later to an Air Clean
Unit, provides you with a new clean environment capable of removing dust and
neutralizing static electricity.
• Simultaneous Removal of Particles and Static Electricity
A variable DC system is used for electrostatic discharge. This system can neutralize
static electricity in wide spaces.
Two ion balance sensors provide constant feedback to maintain uniform neutralizing
performance.
• Simultaneous Monitoring of Charged Amount of Workpieces
Electrostatic Sensor ZJ-SD can be connected to the clean sensing system. The
problem of adhesion of particles can be solved by accurately ascertaining the charged
amount of the workpiece, and using the Ionizer Unit to appropriately neutralize static
electricity.
Also, since ZJ-SD data can also be captured on a personal computer via the Interface
Unit, the amount of particles and charged amount can be acquired and collected
simultaneously, and made use of as basic data for improving product quality.
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