5
ZN
System Manual
Section 1 FEATURES
Section 1
What is the "Clean Sensing System?"
■ Improving Product Quality by Multi-point Measurement
Since Air Clean Units and Air Particle Sensors can be connected to each other, the
amount of air particles in multiple clean booths installed in processes can be
comprehensively detected and controlled. Which process is worsening in cleanliness
can be linked to quality control for continual management.
Setting Method p.31
Max. 9 units connected
Max. 10 units connected
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