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Omron ZN-A Series User Manual
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70
ZN
Syst
em Ma
nual
Sectio
n 4
APPENDICES
Section 4
INDEX
P
Principl
e of "Partic
le Count"
44
R
Rapid feed
back
20, 38
S
Scattered li
ght method
44
Setting t
he feedbac
k condi
tions
20, 32
Specifi
cations 53
Air Clean
Unit
54
Air Par
ticle Sens
or
58
, 60
Calcul
ating Unit
62
Clean Mo
nitoring
System
65
Ionizer
Unit
56
Stat
ic El
ectr
icit
y Senso
r
6
T
Troubles
hooting 50
znIX.fm
70ペ
ージ２
００７
年６月
２８日
木曜
日 午
前９時
１８分
79
81
Table of Contents
Default Chapter
7
Editor's Note
7
Notational Conventions
8
Table of Contents
9
Contents
10
Section 1 FEATURES
11
What Is the "Clean Sensing System
12
System Features
12
Features of the Clean Sensing System
14
System Configuration Examples
17
Direct Clean Sensing System
17
Multi-Clean Sensing System
21
Section 2 UPGRADING the SYSTEM
23
Before Upgrading the System
24
Flow of Operations for Upgrading the System
24
Installing the Exclusive Monitoring Software
25
Setup Methods Suited to Specific Applications
28
Automatically Adjusting the Air Volume Level
28
Monitoring/Logging the Amount of Particles
35
Detecting the Cleanliness of Multiple Processes
41
Section 3 BASIC KNOWLEDGE of CLEAN SENSING SYSTEMS
45
Feedback Control
46
What Is "Feedback
46
How Feedback Control Works
50
Clean Sensing
54
Principle of "Particle Count
54
What Is "Cleanliness
55
Section 4 APPENDICES
57
Maintenance
58
Troubleshooting
60
Error Messages and Countermeasures
61
Specifications and Dimensions
63
List of Products
76
Index
79
Revision History
82
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Instruction Sheet
2 pages
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Omron ZN-A Series Specifications
General
Brand
Omron
Model
ZN-A Series
Category
Accessories
Language
English
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